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NPTEL >> Courses >> Chemical Engineering >> Introduction to Microelectronic Fabrication Processes (Web) >> Downloads
Module NameDownloadDescriptionDownload Size
IntroductionChapter 1 AssignmentChapter1 assignment19 kb
LithographyChapter 2 AssignmentChapter 2 Assignment22 kb
Depostion TechniquesChapter 3 AssignmentChapter 3 Assignment12 kb
Removal TechniquesChapter 4 AssignmentChapter 4 Assignment10 kb
FEOLChapter 5 AssignmentChapter 5 Assignment10 kb
DiffusionChapter 6 AssignmentChapter 6 Assignment10 kb
Ion ImplantationChapter 7 AssignmentChapter 7 Assignment9 kb
OxidationChapter 8 AssignmentChapter 8 Assignment9 kb
Process IntegrationChapter 9 AssignmentChapter 9 Assignment10 kb
TestingChapter 10 AssignmentChapter 10 Assignment10 kb
YieldChapter 11 AssignmentChapter 11 Assignment10 kb
Tools and TechniquesChapter 12 AssignmentChapter 12 Assignment9 kb
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